Mounting device and method thereof

ABSTRACT

A mounting device and a method thereof for preventing a pellet from cracking or chipping when the pellet is mounted. A mounting device comprises a first head for mounting a second pellet on a first pellet already mounted and temporarily pressure-bonding the second pellet thereto by applying a first load and a second head for pressure-bonding the second pellet, which has been temporarily pressure-bonded by the first head, to the first pellet by applying a second load higher than the first load. The second head includes a protective sheet which is moved so that the unused portion is set with respect to each pellet, a ball which is supported rollably in arbitrary directions and in contact with the second pellet through the protective sheet, a spring for applying an elastic force in the direction of the protective sheet and applying the second load to the second pellet through the protective sheet, and a drive for rolling the ball on the protective sheet in contact with the second pellet.

BACKGROUND OF THE INVENTION

The present invention relates to a mounting method and a device thereoffor a semiconductor device.

DESCRIPTION OF THE PRIOR ART

In the manufacturing process of a semiconductor device, a mountingdevice has been used for pressure-bonding pellets (also called die),generated from a cut and divided silicon wafer, on a frame. Suchconventional mounting devices have been disclosed in Japanese PatentApplication laid open No. HEI 8-153673 “Semiconductor manufacture deviceand its driving method” and Japanese Patent Application laid open No.HEI 7-161770 “Semiconductor element mounting device and method thereof”.Incidentally, a pellet to be pressure-bonded may be called “work” inorder to be distinguished from the one already mounted on a frame.

FIG. 1 shows the structure of a conventional mounting device. This is amounting device having one head.

A B pellet 35 cut and divided from a wafer is vacuum-contacted from aring (not shown) by a suction elastic collet 33 on the top of a mounthead (not shown), and pressure-bonded (mounted) to an A pellet 36already mounted on a substrate 37 of a stacked IC (Integrated Circuit).

Previous to the pressure-bonding, an adhesive sheet 34 is attached tothe reverse of the B pellet 35. The place where the B pellet 35 is to bemounted is decided by a recognition camera and a recognition device (notshown). Usually, when the B pellet 35 is mounted, a load of around 100 gis applied thereto immediately after the placement of the B pellet 35 onthe A pellet 36.

When using the conventional mounting devices mentioned above, in astacked semiconductor package, in order to put the B pellet directly onthe A pellet, the suction elastic collet has to pick up and hold the Bpellet with a designated angle. Otherwise the respective pelletsinterfere with each other, which causes failures.

Especially, when the pellets are disposed so that they are offset fromeach other, a corner of one pellet and the surface of the other pelletinterfere with each other as shown in FIG. 2, which makes a chip or acrack on the pellets.

Further, the pellet directly attached to the suction elastic collet isput under pressure the moment that it is mounted. Therefore, the pelletis apt to have scratches on its surface.

Such problems arise in the stacked semiconductor package if the pellethas a part which does not overlap another pellet or an under supportwhen mounted. In other words, in the conventional mounting devices, theload is evenly distributed over the surface of the pellet, and affectsonly the part overlapping with the under support. This causes the pelletto crack or chip. These problems are particularly notable when thepellet is at a tilt.

The conventional mounting devices such as those described in the patentapplications mentioned above are not provided with any means to solvethe problems, thus allowing the pellet to crack or chip.

SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provide asemiconductor mounting device and a method thereof for preventing apellet from cracking or chipping when the pellet is mounted.

According to the first aspect of the present invention, to achieve theobject mentioned above, there is provided a mounting device comprising afirst head for mounting a work on a frame or a pellet already mounted onthe frame and temporarily pressure-bonding the work thereto by applyinga first load, and a second head for pressure-bonding the work, which hasbeen temporarily pressure-bonded by the first head, to the frame or thepellet by applying a second load higher than the first load. The secondhead includes: a protective sheet which is moved so that the unusedportion is set with respect to each work; a pressure applicator ofsubstantially spherical shape, which is supported rollably in arbitrarydirections and in contact with the work through the protective sheet; anelastic member for applying an elastic force to the pressure applicatorin the direction of the protective sheet and applying the second load tothe work through the protective sheet; and a drive for rolling thepressure applicator on the protective sheet in contact with the work.

According to the second aspect of the present invention, there isprovided a mounting device comprising a first head for mounting a workon a frame or a pellet already mounted on the frame and temporarilypressure-bonding the work thereto by applying a first load, and a secondhead for pressure-bonding the work, which has been temporarilypressure-bonded by the first head, to the frame or the pellet byapplying a second load higher than the first load. The second headincludes: a protective sheet which is moved so that the unused portionis set with respect to each work; a pressure applicator of substantiallycolumn shape, which is supported rollably in designated directions andin contact with the work through the protective sheet; an elastic memberfor applying an elastic force to the pressure applicator in thedirection of the protective sheet and applying the second load to thework through the protective sheet; and a drive for rolling the pressureapplicator on the protective sheet in contact with the work.

In the first or second aspect of the present invention, it is desirablethat the second head further include: an imaging device for shooting theplace where the work is disposed; a sensor for detecting the position onthe work in contact with the pressure applicator; and a display forindicating the position on the work in contact with the pressureapplicator detected by the sensor on an image shot by the imagingdevice. In addition, it is desirable that the second head furtherinclude a location sensor for detecting the rolling direction androlling amount of the pressure applicator to indicate the track of thepressure applicator on the display based on the information detected bythe location sensor. Furthermore, it is desirable that the second headfurther include a memory for storing the information on the track of thepressure applicator, and a pressure-bonding section for reading out theinformation stored in the memory and pressure-bonding the work to theframe or the pellet based on the information.

According to the third aspect of the present invention, there isprovided a mounting device comprising a first head for mounting a workon a frame or a pellet already mounted on the frame and temporarilypressure-bonding the work thereto by applying a first load, and a secondand a third heads for pressure-bonding the work, which has beentemporarily pressure-bonded by the first head, to the frame or thepellet by applying a second load higher than the first load. The secondand third heads respectively include: a protective sheet which is movedso that the unused portion is set with respect to each work; a pressureapplicator in contact with the work through the protective sheet; anelastic member for applying an elastic force to the pressure applicatorin the direction of the protective sheet and applying the second load tothe work through the protective sheet; and a drive for rolling thepressure applicator on the protective sheet in contact with the work.The pressure applicator of the second head is of substantially sphericalshape and supported rollably in arbitrary directions, while the pressureapplicator of the third head is of substantially column shape andsupported rollably in designated directions.

In the third aspect of the present invention, it is desirable that eachsecond and third head further include: an imaging device for shootingthe place where the work is disposed; a sensor for detecting theposition on the work in contact with the pressure applicator; and adisplay for indicating the position on the work in contact with thepressure applicator detected by the sensor on an image shot by theimaging device. In addition, it is desirable that each of the second andthird heads further include a location sensor for detecting the rollingdirection and rolling amount of the pressure applicator to indicate thetrack of the pressure applicator on the display based on the informationdetected by the location sensor. Furthermore, it is desirable that eachof the second and third heads further include a memory for storing theinformation on the track of the pressure applicator, and apressure-bonding section for reading out the information stored in thememory and pressure-bonding the work to the frame or the pellet based onthe information.

In the structure of any one of the first, second and third aspects ofthe present invention, it is desirable that the protective sheet beprovided between the work and the pressure applicator from reel to reel.

According to the fourth aspect of the present invention, there isprovided a mounting method comprising the steps of: temporarilypressure-bonding a work to a frame or a pellet already mounted on theframe by applying a first load; contacting a pressure applicator ofsubstantially spherical shape, which is supported rollably in arbitrarydirections, with the work through a protective sheet, which is moved sothat the unused portion is set with respect to each work, applying asecond load higher than the first load to the work, which has beentemporarily pressure-bonded; and rolling the pressure applicator on theprotective sheet in contact with the work.

According to the fifth aspect of the present invention, there isprovided a mounting method comprising the steps of: temporarilypressure-bonding a work to a frame or a pellet already mounted on theframe by applying a first load; contacting a pressure applicator ofsubstantially column shape, which is supported rollably in arbitrarydirections, with the work through a protective sheet, which is moved sothat the unused portion is set with respect to each work, applying asecond load higher than the first load to the work, which has beentemporarily pressure-bonded; and rolling the pressure applicator on theprotective sheet in contact with the work.

In the fourth or fifth aspect of the present invention, it is desirablethat the mounting method further include the steps of: shooting, by animaging device, the place where a work is disposed; detecting, by asensor, the position on the work in contact with a pressure applicator;and indicating the position on the work in contact with the pressureapplicator detected by the sensor on an image shot by the imagingdevice. In addition, it is desirable that the mounting method furtherinclude the steps of: detecting, by a location sensor, the rollingdirection and rolling amount of the pressure applicator; and indicatingthe track of the pressure applicator on a display based on theinformation detected by the location sensor. Furthermore, it isdesirable that the mounting method further include the steps of storingthe information on the track of the pressure applicator, andpressure-bonding the work to the frame or the pellet based on theinformation read out of the memory.

In the structure of fourth or fifth aspect of the present invention, itis desirable that the protective sheet be provided between the work andthe pressure applicator from reel to reel.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and further objects and novel features of the presentinvention will be more fully understood from the following detaileddescription when the same is read in connection with the accompanyingdrawings in which:

FIG. 1 is a diagram showing a head of conventional mounting device;

FIG. 2 is a diagram showing the situation where pellets crack or chipwhen a conventional mounting device is used;

FIG. 3 is a diagram showing the operation for temporary pressure-bondingusing a first head of a mounting device according to the firstembodiment of the present invention;

FIG. 4 is a diagram showing the structure of the second head of amounting device according to the first embodiment of the presentinvention;

FIG. 5 is a diagram showing the second head touching a pellet accordingto the first embodiment of the present invention;

FIG. 6 is a diagram showing an example of the track of the second head;and

FIG. 7 is a diagram showing the structure of a second head of a mountingdevice according to the second embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the drawings, a description of preferred embodiments ofthe present invention will be given in detail.

In the following, the first embodiment will be described. A mountingdevice of the first embodiment comprises two kinds of heads for mountinga pellet. A first head 2 is used for temporary pressure-bonding of apellet, while a second head 7 is used for proper pressure-bonding of thepellet.

FIG. 3 is a diagram showing the first head 2 for temporarilypressure-bonding a pellet according to the first embodiment. Referringto FIG. 3, a description will be given of the operation of the mountingdevice for temporarily pressure-bonding a pellet with the first head 2.A pellet 4 cut and divided from a wafer is vacum-contacted from a ring(not shown) by a suction elastic collet 3 on the top of the first head2, and temporarily pressure-bonded to a pellet 1 already mounted on asubstrate of a stacked IC.

Here, an adhesive sheet 5 is previously attached to the reverse of thepellet 4. The place where the pellet 4 is to be mounted is decided by arecognition camera and a recognition device (not shown). When pellet 4is mounted, a load (around 50 g), which does not cause displacement ofthe pellet 4, is applied thereto immediately after the placement of thepellet 4 on the pellet 1.

After the temporary pressure-bonding of the pellet 4 on the pellet 1 bythe first head 2, the second head 7 properly pressure bonds the pellet 4to the pellet 1.

FIG. 4 is a diagram showing the structure of the second head 7. Thesecond head 7 comprises a ball 6, location sensors 8, a spring 11, ahollowcylindical part 12, a ball bearing 13, a light sensor 14, a headchassis 10 having a pressure sensor 15, a pellet protective sheet 16,and tension applicators 17 for applying a designated tension on theprotective sheet 16. A drive 18 is equipped with the second head 7 andmovable in X, Y and Z directions.

The hollowcylindical part 12 and the ball bearing 13 are pressed to theball 6 by the spring 11 having a predetermined spring constant, andmovable inside the head chassis 10 in vertical directions (directions ofexpansion and contraction of the spring 11). An arbitrary load can beevenly applied to the ball 6.

The ball 6 protrudes to the outside of the head chassis 10 through aball supporting hall 9 formed at the bottom of the head chassis 10.Three rollers are placed around the ball 6 in contacting relationthereto so that the ball 6 can roll in arbitrary directions while guidedby the ball supporting hall 9 and pressed by the spring 11. The ball 6never falls from the head chassis 10 because the inside diameter of theball supporting hall 9 is smaller than the diameter of the ball 6.

Two or three location sensors 8, placed around the ball 6 detect therolling direction and rolling amount of the ball 6. Based on the outputof the location sensor 8, the direction and amount of movement of thesecond head 7 is calculated.

The light sensor 14 and the pressure sensor 15 are placed above thehollowsylindical part 12. The light sensor detects the distancetherefrom to the edge of the hollowsylindical part 12 to measure therelative height at which the ball 6 is set. The pressure sensor 15detects the amount of pressure applied. Further, below the ball 6, apellet protective sheet 16, wound on and off by rolls (not shown),stretched parallel to the surface of the pellet by the tensionapplicator 17. The pellet protective sheet 16 is wound on and off therolls each time a pellet is pressure-bonded so that the unused portionis winded off.

Because there is a regular space between the pellet protective sheet 16and the ball 6, the ball 6 applies no impact force to the pellet 4 whenthe second head 7 touches the pellet 4. As shown in FIG. 5, when thepellet 4 is press-bonded to the pellet 1, the ball 6 approachesgradually to touch the pellet protective sheet 16, and applies adesignated load on the pellet 4.

A description will be given of the operation of the mounting device formounting the pellet 4 on the pellet 1 already mounted on the substrate37.

The suction elastic collet 3 of the first head 2 holds the pellet 4 tothe reverse of which the adhesive sheet 5 is previously attached. Thepellet 4 is moved onto the pellet 1 and subjected to a load of 50 gcorresponding to about a half of a conventional mounting load. Thereby,the pellet 4 is temporarily pressure-bonded on the pellet 1.

When the pellet 4 is temporary pressure-bonded, its location is shot bya recognition camera (not shown), and the image is displayed on arecognition device 27.

Next, the second head 7 moves to a designated position and descends ontothe pellet 4. At this point, the pellet 4 is contacted by only thepellet protective sheet 16. The ball 6 touching the pellet 4 through thepellet protective sheet 16 is rolled and moved on the pellet protectivesheet 16 by the drive 18 which moves the second head 7. In this process,the light sensor 14 and the pressure sensor 15 detect the incline of thepellet 1 (in other words, the pressure-bonding condition of an adhesivepaste or an adhesive sheet on the reverse of the pellet 1). Based on theoutput of these sensors, a load for pressure-bonding the pellet 4 isset, and the pellet 4 is pressure-bonded to the pellet 1. For example,the ball 6 touching the pellet 4 through the pellet protective sheet 16rolls on the pellet protective sheet 16 while applying a load of around100 g on the pellet 4. In this process, the load on the pellet 4 isadjusted by feedback control using data detected by the light sensor 14and the pressure sensor 15.

Additionally, a user may move the ball 6 by controlling the drive 18manually using an input device (not shown).

Incidentally, because of the pellet protective sheet 16 between the ball6 and the pellet 4, the rolling movement of the ball 6 causes noscratches on the surface of the pellet 4 while the ball 6 is rollingthereon.

The rolling direction and rolling amount of the ball 6 is detected bythe location sensor 8 and displayed on the recognition device 27. FIG. 6shows an example of display on the recognition device 27. A cross line29 indicates the center point of the ball 6. A track 28 shows themovement track of the ball 6. As shown in FIG. 6, the ball 6 rolls onlyon the part of the pellet 1 which overlaps the pellet 4 (in other word,the part under which a support is placed). Thus, it is possible toprevent the pellets from chipping and cracking. In addition, the ball 6does not necessarily move in a rectangular path, but it may movespirally, radially, or reciprocate in a line according to the mountcondition of the pellets 1 and 4.

Further, the movement track of the ball 6 and a load applied to thepellet 4 may be stored in a memory (not shown) and read out topress-bond other pellets. In this way, it is possible to repeatpressure-bonding of pellets under the same condition.

On completion of proper pressure-bonding, the second head 7 movesupwards and away from the pellet 4. After that, the pellet protectivesheet 16 is wound on and off the rolls so that the unused portion isplaced between the tension applicators 17.

The mounting device of this embodiment temporarily pressure-bondspellets with a load about half of a conventional one using the firsthead, and applies a load only to the part which overlaps an undersupport using the second head. Thus, it is possible to prevent pelletsfrom chipping and cracking.

Furthermore, because the pellet is shot by the recognition camera anddisplayed on the recognition device, the amount and direction ofmovement of the ball are easily checked during pressure-bonding ofpellets with the second head.

A description of the second embodiment of the present invention will begiven. A mounting device of this embodiment has two heads as with thatof the first embodiment.

A first head of the mounting device according to the second embodimentis of the same structure as that of the first embodiment. FIG. 7 showsthe structure of a second head 38 of the mounting device according tothe second embodiment. The second head 38 comprises a rubber roller 41,location sensors 42, a roller supporting plate 43, a spring 44, a headchassis 46 including a light sensor 14 and a pressure sensor 15, apellet protective sheet 16 and tension applicators 17 for applying adesignated tension to the pellet protective sheet 16. The second head 38is mounted to a drive 39 movable in X, Y and Z directions.

The roller supporting plate 43 is pressed to the rubber roller 41 by thespring 44 having a predetermined spring constant, and movable inside thehead chassis 46 in vertical directions (direction of expansion andcontraction of the spring 44). An arbitrary load can be evenly appliedto the rubber roller 41.

The rubber roller 41 protrudes to the outside of the head chassis 46through a roller supporting hall 45 formed at the bottom of the headchassis 46. The rubber roller 41 is supported to rollably on a pivot 40,and can roll in arbitrary directions while guided by the rollersupporting hall 45 and pressed by the spring 44. The rubber roller 41never falls from the head chassis 46 because the width of the rollersupporting hall 45 is smaller than that of the rubber roller 41.

The rubber roller 41 can be produced by forming engineering plastic intoa column shape with the rotary shaft 40 in the center, and fitting anNBR rubber tube around it.

Two location sensors 42, placed along the rolling direction of therubber roller 41, detecting the rolling direction and rolling amount ofthe rubber roller 41. Based on the output of the location sensor 42, thedirection and amount of movement of the second head 38 are calculated.

The light sensor 14 and the pressure sensor 15 are placed above theroller supporting plate 43. The light sensor 14 measures the relativeheight at which the rubber roller 41 is set. The pressure sensor 15detects the amount of pressure applied. Further, below the rubber roller41, a pellet protective sheet 16 winded on and off rolls (not shown),stretched parallel to the surface of the pellet by the tensionapplicators 17. The pellet protective sheet 16 is wound on and off therolls each time a pellet is pressure-bonded so that the unused portionis winded off.

Because there is a regular space between the pellet protective sheet 16and the rubber roller 41, the rubber roller 41 applies no impact forceto the pellet 4 when the second head 38 touches the pellet 4. When thepellet 4 is press-bonded to the pellet 1, the rubber roller 41approaches gradually to touch the pellet protective sheet 16, andapplies a designated load on the pellet 4.

The mounting device of this embodiment, as with that of the firstembodiment, only the desired part of the pellet can be pressed. Thus, itis possible to prevent pellets from chipping and cracking.

Furthermore, in the case of producing a semiconductor device, themounting device of this embodiment requires less time forpressure-bonding of pellets as compared to that of the first embodimentbecause the rubber roller 41 and the pellet are in line contact. Morespecifically, in the first embodiment described above, because the ball6 makes a point contact with the pellet 4 through the pellet protectivesheet 16, the ball 6 needs to move spirally or circularly for pressingthe pellet 4. On the other hand, in this embodiment, because the rubberroller 41 makes a line contact with the pellet 4 through the pelletprotective sheet 16, the same area can be pressed within shorter time.Consequently, throughput can be improved in the semiconductormanufacturing process. Incidentally, the rubber roller 41 which hasrolled on the pellet 4, once moves away from the pellet 4, and isrepositioned by the drive 39 before touching again the pellet 4 throughthe pellet protective sheet 16 to presses the pellet 4.

A description of the third embodiment of the present invention will begiven. A mounting device of this embodiment comprises the second head 7of the mounting device of the first embodiment and the second head 38 ofthe mounting device of the second embodiment.

The mounting device of this embodiment, adopts the second head 38 havingthe rubber roller 41 making a line contact with the pellet 4 through thepellet protective sheet 16 when pressing the area overlapping one ormore under supports in stack structure. On the other hand, the mountingdevice adopts the second head 7 having the ball 6 making a point contactwith the pellet 4 through the pellet protective sheet 16 when pressingthe area not overlapping any of under supports or part of under supportsin stack structure.

With the second head 7, because it is possible to press the narrow area,mount material can be pressed to have uniform thickness by controllingthe amount of load applied and a position where the load is applied.

On the other hand, with the second head 38, because it is possible topress the mount material evenly, the time taken to completepressure-bonding can be reduced.

As described above, by using two kinds of heads depending on the typesof stack structures, it is possible to use the heads effectively forpressure-bonding of pellets.

While, in the embodiments described above, pressure-bonding of twopellets is described as an example, three or more pellets may bestacked.

While the present invention has been described with reference to theparticular illustrative embodiments, it is not to be restricted by theembodiments but only by the appended claims. It is to be appreciatedthat those skilled in the art can change or modify the embodimentswithout departing from the scope and spirit of the present invention.

1. A mounting device comprising: a first head for mounting a work on aframe or a pellet already mounted on the frame and temporarilypressure-bonding the work thereto by applying a first load; and a secondhead for pressure-bonding the work, which has been temporarilypressure-bonded by the first head, to the frame or the pellet byapplying a second load higher than the first head, wherein the secondhead includes: a protective sheet, which is moved so that the unusedportion is set with respect to each work; a pressure applicator ofsubstantially spherical shape, which is supported rollably in arbitrarydirections and in contact with the work through the protective sheet; anelastic member for applying an elastic force to the pressure applicatorin the direction of the protective sheet and applying the second load tothe work through the protective sheet; and a drive for rolling thepressure applicator on the protective sheet in contact with the work. 2.The mounting device claimed in claim 1, wherein the second head furtherincludes: an imaging device for shooting the place where the work isdisposed; a sensor for detecting the position on the work in contactwith the pressure applicator; and a display for indicating the positionon the work in contact with the pressure applicator detected by thesensor on an image shot by the imaging device.
 3. The mounting deviceclaimed in claim 2, wherein the second head further includes a locationsensor for detecting the rolling direction and rolling amount of thepressure applicator to indicate the track of the pressure applicator onthe display based on the information detected by the location sensor. 4.The mounting device claimed in claim 3, wherein the second head furtherincludes a memory for storing the information on the track of thepressure applicator, and a pressure-bonding section for reading out theinformation stored in the memory and pressure-bonding the work to theframe or the pellet based on the information.
 5. A mounting deviceclaimed in claim 1, wherein the protective sheet is provided between thework and the pressure applicator from reel to reel.
 6. A mounting devicecomprising: a first head for mounting a work on a frame or a pelletalready mounted and temporarily pressure-bonding the work thereto byapplying a first load; and a second head for pressure-bonding the work,which has been temporarily pressure-bonded by the first head, to theframe or the pellet by applying a second load higher than the firsthead, wherein the second head includes: a protective sheet, which ismoved so that the unused portion is set with respect to each work; apressure applicator of substantially column shape, which is supportedrollably in arbitrary directions and in contact with the work throughthe protective sheet; an elastic member for applying an elastic force tothe pressure applicator in the direction of the protective sheet andapplying the second load to the work through the protective sheet; and adrive for rolling the pressure applicator on the protective sheet incontact with the work.
 7. The mounting device claimed in claim 6,wherein the second head further includes: an imaging device for shootingthe place where the work is disposed; a sensor for detecting theposition on the work in contact with the pressure applicator; and adisplay for indicating the position on the work in contact with thepressure applicator detected by the sensor on an image shot by theimaging device.
 8. The mounting device claimed in claim 7, wherein thesecond head further includes a location sensor for detecting the rollingdirection and rolling amount of the pressure applicator to indicate thetrack of the pressure applicator on the display based on the informationdetected by the location sensor.
 9. The mounting device claimed in claim8, wherein the second head further includes a memory for storing theinformation on the track of the pressure applicator, and apressure-bonding section for reading out the information stored in thememory and pressure-bonding the work to the frame or the pellet based onthe information.
 10. A mounting device claimed in claim 6, wherein theprotective sheet is provided between the work and the pressureapplicator from reel to reel.
 11. A mounting device comprising: a firsthead for mounting a work on a frame or a pellet already mounted on theframe and temporarily pressure-bonding the work thereto by applying afirst load; and second and third heads for pressure-bonding the work,which has been temporarily pressure-bonded by the first head, to theframe or the pellet by applying a second load higher than the firsthead, wherein each of the second and third head includes: a protectivesheet, which is moved so that the unused portion is set with respect toeach work; a pressure applicator in contact with the work through theprotective sheet; an elastic member for applying an elastic force to thepressure applicator in the direction of the protective sheet andapplying the second load to the work through the protective sheet; and adrive for rolling the pressure applicator on the protective sheet incontact with the work; the pressure applicator of the second head is ofsubstantially spherical shape and supported in arbitrary directions; andthe pressure applicator of the third head is of substantially columnshape and supported in designated directions.
 12. A mounting deviceclaimed in claim 11, wherein each of the second and third heads furtherincludes: an imaging device for shooting the place where the work isdisposed; a sensor for detecting the position on the work in contactwith the pressure applicator; and a display for indicating the positionon the work in contact with the pressure applicator detected by thesensor on an image shot by the imaging device.
 13. A mounting deviceclaimed in claim 12, wherein each of the second and third heads furtherincludes a location sensor for detecting the rolling direction androlling amount of the pressure applicator to indicate the track of thepressure applicator on the display based on the information detected bythe location sensor.
 14. A mounting device claimed in claim 13, whereineach of the second and third heads further includes a memory for storingthe information on the track of the pressure applicator and apressure-bonding section for reading out the information stored in thememory and pressure-bonding the work to the frame or the pellet based onthe information.
 15. A mounting device claimed in claim 11, wherein theprotective sheet is provided between the work and the pressureapplicator from reel to reel.